KXTJ3-1057

ROHM Semiconductor's KXTJ3-1057 is a tri-axis ±2g, ±4g, ±8g, or ±16g silicon micromachined accelerometer. The sense element is fabricated using Kionix's proprietary plasma micromachining process technology. Acceleration sensing is based in the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and digital communications.